JPS6166942U - - Google Patents
Info
- Publication number
- JPS6166942U JPS6166942U JP15151184U JP15151184U JPS6166942U JP S6166942 U JPS6166942 U JP S6166942U JP 15151184 U JP15151184 U JP 15151184U JP 15151184 U JP15151184 U JP 15151184U JP S6166942 U JPS6166942 U JP S6166942U
- Authority
- JP
- Japan
- Prior art keywords
- pantograph
- longitudinal drive
- cassettes
- drive mechanism
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151184U JPS6166942U (en]) | 1984-10-05 | 1984-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151184U JPS6166942U (en]) | 1984-10-05 | 1984-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166942U true JPS6166942U (en]) | 1986-05-08 |
Family
ID=30709621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15151184U Pending JPS6166942U (en]) | 1984-10-05 | 1984-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166942U (en]) |
-
1984
- 1984-10-05 JP JP15151184U patent/JPS6166942U/ja active Pending